Home
Sol-Gel

COATINGS : AN INTRODUCTION TO THE CLEANING PROCEDURES


by William R. BIRCH


 

RELATED LINKS

Companies

  • Crest Ultrasonics
    Complete line of ultrasonic cleaning equipment and chemistries
  • Millipore
    Filters and other engineering products and services for cleaning fluids and materials.
  • Labwater.com
    Laboratory water purification products. Replacement filters and membranes for most laboratory water systems. Complete laboratory water purification systems
  • Nalgene Brand Labware
    The complete NALGENE Product Catalog online
  • Unisil Corp.
  • BYK-Chemie
    Additives for Coatings and Paints

Chemicals & Hazards

 

Cleaning techniques

  • UV-Ozone cleaning (pdf file 3 Mo)
    by John Vig  45 pages, 175 references. (pdf file 3Mo)
    Chapter 6 of "Handbook of semiconductor wafer cleaning technology. Science, Technology & Applications" Ed. by W. Kern, Noyes Publications, 1993
    The UV/Ozone cleaning procedure has been shown to be a highly effective method of removing a variety of contaminants from silicon and compound semiconductor wafers, as well as from many other types of surface. John Vig describes here the technique, the underlying mechanisms, the variables involved, safety considerations and details for construction of a UV/Ozone cleaning facility. 45 pages, 175 references.
    Copyright notice
    Although the book in which this chapter appears is copyrighted, the author is an employee of the U.S. Government and performed this work as part of his official duties. The work is, therefore, not subject to copyright protection by the publisher.
  • Uvocs
    UV/Ozone cleaning
  • Advanced Plasma Surface Cleaning Techniques (Introduction)
    From ONRL National Laboratory
  • Plasma for cleaning & etchning
  • Plasma Cleaning and Drying: Alternatives to Conventional Technologies
    Online paper by Mario A. Hozbor, Andreo C. Greene,1994 
  • Plasma cleaning: Suppliers list
    From Powesourcing.com
  • Laser cleaning suppliers list
    From Micromagazine.com Buyers Guide

 

Help us improve this page

Please take a few moments to give us your feedback and what feature articles you would like to see in the near future. 

 

Back to Previous Page Previous page
 

Designed by M. Prassas and maintained by the worldwide Sol-Gel community.
Copyright © 2000-2003, SolGel.com All rights reserved
Disclaimer