Sheet resistance vs. sintering temperature of dip-coated SnO₂:Sb (ATO, 10 layers), In₂O₃ (ITO, 2 layers) and ZnO:Al (AZO, 10 layers) on silica glass

http://www.inm-gmbh.de

Contact:
Prof. Dr. M. A. Aegerter,
Coating Technology
Department
Tel.: ++49-681-9300-317
Fax: ++49-681-9300-223

• Development of transparent electrical conducting coatings of ZnO:Al (AZO), SnO₂:Sb (ATO) and In₂O₃:Sn (ITO) with a defined sheet resistance, high optical transmission and good homogeneity using the Sol-Gel process

Method

• The coatings are obtained by dip- or spin-coating process using stabilized sols. The sheet resistance can be adjusted by varying the layer thickness and sintering temperature

Results

• Adjustable sheet resistance (±  2 %) with high homogeneity of the thickness (±  2 nm)
• Sheet resistance as low as 150-200 Wo on float glass at 550 °C for ATO and AZO (a buffer interlayer is necessary) and on borosilicate and silica glass at 600-650 °C
• Sheet resistance < 200 Wo with an ITO double layer at 900-1000 °C on silica glass
• Up to a substrate size of 1 m² (dip-coating)
  

• Temperature stability up to 800°C for ATO coatings and up to 900°C for ITO coatings
• High transmission in the visible range:

Applications

• Antistatic coatings, can also be applied on the inside of tubes
• Heat insulating coatings
• Electromagnetic shielding
• Touch screen panel