Sheet resistances of spray pyrolyzed ITO, ATO and FTO-layers vs film
thickness on flat borosilicate glass

http://www.inm-gmbh.de

Contact:
Prof. Dr. M. A. Aegerter,
Coating Technology
Department
Tel.: ++49-681-9300-317
Fax: ++49-681-9300-223

• Development of an inexpensive spraying method to obtain transparent electrical conductive In₂O₃:Sn (ITO), SnO₂:F (FTO) and SnO₂:Sb (ATO)-coatings on glass substrates with high conductivity

Basic principle

• Spraying a solution on heated glass panels (»  500 °C) results in the formation of an electrical conductive oxide layer on the hot glass surface by a chemical reaction
• Annealing in a reducing atmosphere (ITO only) increases the electrical conductivity

Results

• Sheet resistance as low as 30 W_o for ATO, 18 Wo for FTO and 12 Wo for ITO coatings with »  350 nm film thickness
• Thermal treatment under reducing atmosphere decreases the sheet resistance of ITO films to < 6 Wo

• High conductivity of sprayed and subsequently bent and reduced ITO coatings (is similar to that of reduced flat ITO coatings)

Advantages

• Simpler method in comparison to sputter deposition (no vacuum necessary)
• Deposition on large flat and curved glass panels is possible with spray roboters

Applications

• use as transparent electrical conductors:
• Solar and electrochromic cells
• Cathodic ray tubes (CRT)
• Touch screen panels
• Liquid crystal displays (LCD)
• Electromagnetic shielding
• Antistatic coating
• use as IR (Infra Red)-reflecting coatings:
• Window panels (energy saving of buildings)
• Lamps (energy saving, low IR-emission)
• Windows for cars, trains, doors of ovens