Hi !
In my company, we have developped some new tool to measure thickness, pore size distribution and porosity on thin film on any substrate without needing of scratching the film. It is an Ellipsometer Porosimeter that is based on the well known Spectroscopic ellipsometry method. We use the same cycle ( adsorption / desorption) as standart BET but we measure the change of the refractive indices versus the relative pressure or humidity in the sample chamber ( depending on the solvant that we use).It is fast ( 30 minutes), does not need any low temperature or pressure and need very low amount of material. For a test, you can contact me directly at :
christophe.defranoux@sopra-sa.com
Regards