Hallo, if you look to www.afep.cornell.edu there is a well established ellipsometry website. I have the same problem as you and I am looking for a software to enhance an old manual ellipsometer. Additionally I am looking for the benefits and necessities of variable angle ellipsometry , and of course for the needed accuracy. I want to incorporate an ellipsometer into a sputter coating chamber for in situ control and have to design the windows, the angles, the automatization and computerization. May be we can start a discussion on these topics. Greeting from Germany R.Haberland

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