After a few minutes of thought, I would say that your requirements make this impossible.
I have made some TiN from solgel but it wasn't simple and wasn't low temperature. Nitrogen will not replace oxygen under most conditions so oxygen free starting materials are required. Then you have to add energy and nitrogen to the system to form the nitride. A high temperature furnace and ammonia atmosphere worked but is tricky since the ammonia is flammable.
I would think a CVD or PCVD process would be easier.